화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Homoepitaxial growth of 4H-SiC on trenched substrates by chemical vapor deposition
Chen Y, Kimoto T, Takeuchi Y, Malhan RK, Matsunami H
Materials Science Forum, 457-460, 189, 2004
2 Evaluation of trench oxide protection techniques on ultra high voltage (10 kV) 4H-SiC UMOSFETs
Rashid SJ, Mihaila A, Udrea F, Malhan RK, Amaratunga G
Materials Science Forum, 457-460, 1441, 2004
3 Physical mechanism for the anomalous behavior of n-type dopants in SiC
Malhan RK, Kozima J, Yamamoto T, Fukumoto A
Materials Science Forum, 389-3, 541, 2002
4 Micro-structural and electrical properties of Al-implanted & lamp-annealed 4H-SiC
Nakamura H, Watanabe H, Yamazaki J, Tanaka N, Malhan RK
Materials Science Forum, 389-3, 807, 2002
5 Impact of SiC structural defects on the degradation phenomenon of bipolar SiC devices
Malhan RK, Nakamura H, Onda S, Nakamura D, Hara K
Materials Science Forum, 433-4, 917, 2002
6 Effect of C/B sequential implantation on the B acceptors in 4H-SiC
Nakano Y, Kachi T, Tadano H, Malhan RK
Journal of Crystal Growth, 210(1-3), 283, 2000