화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Comparison of Different Analytical Techniques in Measuring the Surface Region of Ultrashallow Doping Profiles
Felch SB, Chapek DL, Malik SM, Maillot P, Ishida E, Magee CW
Journal of Vacuum Science & Technology B, 14(1), 336, 1996
2 Silicon-on-Insulator Material Qualification for Low-Power Complementary Metal-Oxide-Semiconductor Application
Mendicino MA, Vasudev PK, Maillot P, Hoener C, Baylis J, Bennett J, Boden T, Jackett S, Huffman K, Godwin M
Thin Solid Films, 270(1-2), 578, 1995