검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thermal reaction of polycrystalline SiC with XeF2 Watanabe M, Mori Y, Sakai H, Iida T, Koide S, Maeta E, Sawabe K, Shobatake K Journal of Vacuum Science & Technology A, 23(6), 1638, 2005 |
| No. | Article |
|---|---|
| 1 |
Thermal reaction of polycrystalline SiC with XeF2 Watanabe M, Mori Y, Sakai H, Iida T, Koide S, Maeta E, Sawabe K, Shobatake K Journal of Vacuum Science & Technology A, 23(6), 1638, 2005 |