검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films Endle JP, Sun YM, Nguyen N, Madhukar S, Hance RL, White JM, Ekerdt JG Thin Solid Films, 388(1-2), 126, 2001 |
| 2 |
Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium Sun YM, Yan XM, Mettlach N, Endle JP, Kirsch PD, Ekerdt JG, Madhukar S, Hance RL, White JM Journal of Vacuum Science & Technology A, 18(1), 10, 2000 |