검색결과 : 1건
No. | Article |
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1 |
Heteroepitaxial growth of SiC on Si(100) and (111) by chemical vapor deposition using trimethylsilane Madapura S, Steckl AJ, Loboda M Journal of the Electrochemical Society, 146(3), 1197, 1999 |
No. | Article |
---|---|
1 |
Heteroepitaxial growth of SiC on Si(100) and (111) by chemical vapor deposition using trimethylsilane Madapura S, Steckl AJ, Loboda M Journal of the Electrochemical Society, 146(3), 1197, 1999 |