검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study on poly depletion in sub-0.1 mu m metal-oxide-semiconductor field effect transistors by scanning capacitance microscopy Wang YG, Edwards H, Ukraintsev V, Wu J, Chen J, Waller J, Woodall D, Scott DB, Machala C, Ekbote S, Tsao A Journal of Vacuum Science & Technology B, 22(1), 381, 2004 |
| 2 |
Effect of nitride sidewall spacer process on boron dose loss in ultrashallow junction formation Kohli P, Jain A, Bu H, Chakravarthi S, Machala C, Dunham ST, Banerjee SK Journal of Vacuum Science & Technology B, 22(1), 471, 2004 |