검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Sub-nanometer resolution XPS depth profiling: Sensing of atoms Szklarczyk M, Macak K, Roberts AJ, Takahashi K, Hutton S, Glaszczka R, Blomfield C Applied Surface Science, 411, 386, 2017 |
| 2 |
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge Macak K, Kouznetsov V, Schneider J, Helmersson U, Petrov I Journal of Vacuum Science & Technology A, 18(4), 1533, 2000 |
| 3 |
Mechanisms for reactive DC magnetron sputtering of elements with different atomic masses: large area coatings of Al oxide and W oxide Olsson MK, Macak K Thin Solid Films, 371(1-2), 86, 2000 |
| 4 |
Epitaxial growth of W-doped VO2/V2O3 multilayer on alpha-Al2O3(110) by reactive magnetron sputtering Jin P, Tazawa M, Yoshimura K, Igarashi K, Tanemura S, Macak K, Helmersson U Thin Solid Films, 375(1-2), 128, 2000 |
| 5 |
Growth and characterization of epitaxial films of tungsten-doped vanadium oxides on sapphire (110) by reactive magnetron sputtering Jin P, Tazawa M, Ikeyama M, Tanemura S, Macak K, Wang X, Olafsson S, Helmersson U Journal of Vacuum Science & Technology A, 17(4), 1817, 1999 |
| 6 |
High rate reactive de magnetron sputter deposition of Al2O3 films Olsson MK, Macak K, Helmersson U, Hjorvarsson B Journal of Vacuum Science & Technology A, 16(2), 639, 1998 |
| 7 |
Modeling of the deposition of stoichiometric Al2O3 using nonarcing direct current magnetron sputtering Macak K, Nyberg T, Macak P, Olsson MK, Helmersson U, Berg S Journal of Vacuum Science & Technology A, 16(3), 1286, 1998 |