검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Characterization and integration of new porous low-k dielectric (k < 2.3) for 65 nm technology and beyond Choi KK, Cho IH, Park SJ, Lim JE, Jung OJ, Park JH, Min BS, Hwang SB, Ko MJ, Lee JG Thin Solid Films, 515(12), 5025, 2007 |
| 2 |
Removal of moisture contamination from porous polymeric low-k dielectric films Iqbal A, Juneja H, Yao JP, Shadman F AIChE Journal, 52(4), 1586, 2006 |
| 3 |
Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties Ciaramella F, Jousseaume V, Maitrejean S, Verdier M, Remiat B, Zenasni A, Passemard G Thin Solid Films, 495(1-2), 124, 2006 |
| 4 |
Positronium annihilation lifetime spectroscopy of porous low-k films with periodic pore structures Ohdaira T, Suzuki R, Shirataki H, Matsuno SY Materials Science Forum, 445-6, 334, 2004 |