검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Rate-limiting steps during nitrogen incorporation in furnace-grown silicon oxynitrides: effects on wafer-to-wafer uniformity Dang SS, Takoudis CG Thin Solid Films, 366(1-2), 225, 2000 |
| No. | Article |
|---|---|
| 1 |
Rate-limiting steps during nitrogen incorporation in furnace-grown silicon oxynitrides: effects on wafer-to-wafer uniformity Dang SS, Takoudis CG Thin Solid Films, 366(1-2), 225, 2000 |