검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of deposition pressure and power on characteristics of RF-Sputtered Mo films and investigation of sodium diffusion in the films Akcay N, Sonmez NA, Zaretskaya EP, Ozcelik S Current Applied Physics, 18(5), 491, 2018 |
| 2 |
High-rate deposition of biaxially textured yttria-stabilized zirconia by dual magnetron oblique sputtering Kaufman DY, DeLuca PM, Tsai T, Barnett SA Journal of Vacuum Science & Technology A, 17(5), 2826, 1999 |
| 3 |
Analysis of Thin-Film Stress Measurement Techniques Malhotra SG, Rek ZU, Yalisove SM, Bilello JC Thin Solid Films, 301(1-2), 45, 1997 |