검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio Monteiro OR Journal of Vacuum Science & Technology B, 17(3), 1094, 1999 |
| No. | Article |
|---|---|
| 1 |
Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio Monteiro OR Journal of Vacuum Science & Technology B, 17(3), 1094, 1999 |