검색결과 : 2건
No. | Article |
---|---|
1 |
Characterization of Buried Cobalt Silicide Layers in Si by MEVVA Implantation Peng QC, Wong SP, Wilson IH, Wang N, Fung KK Thin Solid Films, 270(1-2), 573, 1995 |
2 |
Electrical and Structural-Properties of Buried CoSi2 Layers in Si(100) Grown by Molecular-Beam Allotaxy Dolle M, Gassig U, Bay HL, Schuppen A, Mantl S Thin Solid Films, 253(1-2), 485, 1994 |