검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Growth of cubic silicon carbide on oxide using polysilicon as a seed layer for micro-electro-mechanical machine applications Frewin CL, Locke C, Wang J, Spagnol P, Saddow SE Journal of Crystal Growth, 311(17), 4179, 2009 |
| 2 |
Multi-coating법으로 제조된 두꺼운 PZT막의 두께 변화에 따른 미세구조 및 전기적 특성 박준식, 장연태, 박효덕, 최승철, 강성군 Korean Journal of Materials Research, 12(3), 211, 2002 |
| 3 |
Release of multi-layer metal structure in MEMS devices by dry etching technique Das NC Solid-State Electronics, 46(4), 501, 2002 |