검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Numerical optimization of cold trap designs for the Karlsruhe Sodium Laboratory Onea A, Hering W, Lux M, Stieglitz R International Journal of Heat and Mass Transfer, 113, 984, 2017 |
| 2 |
Design, optimization and layout of a compact cold trap with high efficient heat recovery by a helical coil for the Karlsruhe Sodium Laboratory Onea A, Lux M, Hering W, Stieglitz R International Journal of Heat and Mass Transfer, 113, 1000, 2017 |
| 3 |
Towards Fully Aqueous Ozone Wet Strip of 193 nm Photoresist Stack Using UV Pre-Treatments in Low-k Patterning Applications Kesters E, Le QT, Lux M, Pittevils J, Vereecke G, Struyf H, De Gendt S Journal of the Electrochemical Society, 159(5), D287, 2012 |
| 4 |
Chemical and structural modifications in a 193-nm photoresist after low-k dry etch Kesters E, Claes M, Le QT, Lux M, Franquet A, Vereecke G, Mertens PW, Frank MM, Carleer R, Adriaensens P, Biebuyk JJ, Bebelman S Thin Solid Films, 516(11), 3454, 2008 |
| 5 |
Removal of submicrometer particles from silicon wafer surfaces using HF-based cleaning mixtures Vos R, Lux M, Xu K, Fyen W, Kenens C, Conard T, Mertens P, Heyns M, Hatcher Z, Hoffman M Journal of the Electrochemical Society, 148(12), G683, 2001 |
| 6 |
The many talents of metallocene polyethylene. Lux M, Muller WF Kunststoffe-Plast Europe, 88(8), 1130, 1998 |