검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical Etch Rate of Plasma-Enhanced Chemical-Vapor-Deposited SiO2-Films - Effect of Deposition Parameters Besser RS, Louris PJ, Musket RG Journal of the Electrochemical Society, 144(8), 2859, 1997 |
| No. | Article |
|---|---|
| 1 |
Chemical Etch Rate of Plasma-Enhanced Chemical-Vapor-Deposited SiO2-Films - Effect of Deposition Parameters Besser RS, Louris PJ, Musket RG Journal of the Electrochemical Society, 144(8), 2859, 1997 |