검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Application of laser-cleaning technique for efficient removal of via-etch-induced polymers Lee YP, Loong ST, Zhou MS, Lu YF Journal of the Electrochemical Society, 145(11), 3966, 1998 |
| 2 |
Understanding of via-Etch-Induced Polymer Formation and Its Removal Wang Y, Graham SW, Chan L, Loong ST Journal of the Electrochemical Society, 144(4), 1522, 1997 |