검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental study of Si3N4 viscosity for calibration of stress-dependent models of silicon oxidation Loiko KV, Peidous IV, Zu Y, Ho HM Journal of the Electrochemical Society, 146(11), 4226, 1999 |
| No. | Article |
|---|---|
| 1 |
Experimental study of Si3N4 viscosity for calibration of stress-dependent models of silicon oxidation Loiko KV, Peidous IV, Zu Y, Ho HM Journal of the Electrochemical Society, 146(11), 4226, 1999 |