검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry Petrik P, Cayrel F, Fried M, Polgar O, Lohner I, Vincent L, Alquier D, Gyulai J Thin Solid Films, 455-56, 344, 2004 |