화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Competitive adsorption of metal ions onto hydrophilic silicon surfaces from aqueous solution
Loewenstein LM, Charpin F, Mertens PW
Journal of the Electrochemical Society, 146(2), 719, 1999
2 Competitive adsorption of cations onto the silicon surface -The role of the ammonium ion in ammonia-peroxide solution
Loewenstein LM, Mertens PW
Journal of the Electrochemical Society, 146(10), 3886, 1999
3 Adsorption of metal ions onto hydrophilic silicon surfaces from aqueous solution : Effect of pH
Loewenstein LM, Mertens PW
Journal of the Electrochemical Society, 145(8), 2841, 1998
4 High-Speed Spectral Ellipsometry for in-Situ Diagnostics and Process-Control
Duncan WM, Henck SA, Kuehne JW, Loewenstein LM, Maung S
Journal of Vacuum Science & Technology B, 12(4), 2779, 1994
5 1st-Wafer Effect in Remote Plasma Processing - The Stripping of Photoresist, Silicon-Nitride, and Polysilicon
Loewenstein LM, Stefani JA, Butler SW
Journal of Vacuum Science & Technology B, 12(4), 2810, 1994
6 Sensor Integration into Plasma Etch Reactors of a Developmental Pilot Line
Barna GG, Loewenstein LM, Brankner KJ, Butler SW, Mozumder PK, Stefani JA, Henck SA, Chapados P, Buck D, Maung S, Saxena S, Unruh A
Journal of Vacuum Science & Technology B, 12(4), 2860, 1994