검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Theoretical and experimental investigation of ultrathin oxynitrides and the role of nitrogen at the Si-SiO2 interface Demkov AA, Liu R, Zhang XD, Loechelt H Journal of Vacuum Science & Technology B, 18(5), 2388, 2000 |
| No. | Article |
|---|---|
| 1 |
Theoretical and experimental investigation of ultrathin oxynitrides and the role of nitrogen at the Si-SiO2 interface Demkov AA, Liu R, Zhang XD, Loechelt H Journal of Vacuum Science & Technology B, 18(5), 2388, 2000 |