검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thermal stability of nonstoichiometric silicon nitride films made by reactive dc magnetron sputter deposition Lobl HP, Huppertz M Thin Solid Films, 317(1-2), 153, 1998 |
| No. | Article |
|---|---|
| 1 |
Thermal stability of nonstoichiometric silicon nitride films made by reactive dc magnetron sputter deposition Lobl HP, Huppertz M Thin Solid Films, 317(1-2), 153, 1998 |