화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Raised source/drains for 50 nm MOSFETs using a silane/dichlorosilane mixture for selective epitaxy
Waite AM, Lloyd NS, Osman K, Zhang W, Ernst T, Achard H, Wang Y, Deleonibus S, Hernment PLF, Bagnall DM, Evans AGR, Ashburn P
Solid-State Electronics, 49(4), 529, 2005
2 Fabrication and electron transport in multilayer silicon-insulater-silicon nanopillars
Pooley DM, Ahmed H, Lloyd NS
Journal of Vacuum Science & Technology B, 17(6), 3235, 1999