검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications Tan SD, Livengood R, Shima D, Notte J, McVey S Journal of Vacuum Science & Technology B, 28(6), C6F15, 2010 |
| 2 |
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Livengood R, Tan S, Greenzweig Y, Notte J, McVey S Journal of Vacuum Science & Technology B, 27(6), 3244, 2009 |
| 3 |
Progress in extreme ultraviolet mask repair using a focused ion beam Liang T, Stivers A, Livengood R, Yan PY, Zhang GJ, Lo FC Journal of Vacuum Science & Technology B, 18(6), 3216, 2000 |