화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Threshold voltage control in TmSiO/HfO2 high-k/metal gate MOSFETs
Litta ED, Hellstrom PE, Ostling M
Solid-State Electronics, 108, 24, 2015
2 Electrical characterization of thulium silicate interfacial layers for integration in high-k/metal gate CMOS technology
Litta ED, Hellstrom PE, Henkel C, Ostling M
Solid-State Electronics, 98, 20, 2014
3 High-Deposition-Rate Atomic Layer Deposition of Thulium Oxide from TmCp3 and H2O
Litta ED, Hellstrom PE, Henkel C, Valerio S, Hallen A, Ostling M
Journal of the Electrochemical Society, 160(11), D538, 2013