검색결과 : 1건
No. | Article |
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1 |
The effect of silicon ion implantation on the structure of tantalum-silicon contacts Peikert M, Bhandari R, Wieser E, Wenzel C, Lipp D, Reuther H, Mucklich A Thin Solid Films, 449(1-2), 187, 2004 |
No. | Article |
---|---|
1 |
The effect of silicon ion implantation on the structure of tantalum-silicon contacts Peikert M, Bhandari R, Wieser E, Wenzel C, Lipp D, Reuther H, Mucklich A Thin Solid Films, 449(1-2), 187, 2004 |