검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Cluster-ion implantation: An approach to fabricate ultrashallow junctions in silicon Lu XM, Shao L, Wang XM, Liu JR, Chu WK, Bennett J, Larson L, Ling PC Journal of Vacuum Science & Technology B, 20(3), 992, 2002 |
| No. | Article |
|---|---|
| 1 |
Cluster-ion implantation: An approach to fabricate ultrashallow junctions in silicon Lu XM, Shao L, Wang XM, Liu JR, Chu WK, Bennett J, Larson L, Ling PC Journal of Vacuum Science & Technology B, 20(3), 992, 2002 |