검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The addition of aluminium to ruthenium liner layers for use as copper diffusion barriers Mccoy AP, Bogan J, Walsh L, Byrne C, Casey P, Hughes G Applied Surface Science, 307, 677, 2014 |
| No. | Article |
|---|---|
| 1 |
The addition of aluminium to ruthenium liner layers for use as copper diffusion barriers Mccoy AP, Bogan J, Walsh L, Byrne C, Casey P, Hughes G Applied Surface Science, 307, 677, 2014 |