검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
PREVAIL-EPL alpha tool: Early results Golladay SD, Pfeiffer HC, Bohnenkamp CA, Dhaliwal RS, Enichen WA, Gordon MS, Kendall RA, Lieberman JE, Stickel W, Rockrohr JD, Tressler EV, Tanimoto A, Yamaguchi T, Okamoto K, Suzuki K, Miura T, Okino T, Kawata S, Morita K, Suzuki SC, Shimizu H, Kojima S, Varnell G, Novak WT, Sogard M Journal of Vacuum Science & Technology B, 19(6), 2459, 2001 |
| 2 |
Projection reduction exposure with variable axis immersion lenses: Next generation lithography Pfeiffer HC, Dhaliwal RS, Golladay SD, Doran SK, Gordon MS, Groves TR, Kendall RA, Lieberman JE, Petric PF, Pinckney DJ, Quickle RJ, Robinson CF, Rockrohr JD, Senesi JJ, Stickel W, Tressler EV, Tanimoto A, Yamaguchi T, Okamoto K, Suzuki K, Okino T, Kawata S, Morita K, Suziki SC, Shimizu H, Kojima S, Varnell G, Novak WT, Stumbo DP, Sogard M Journal of Vacuum Science & Technology B, 17(6), 2840, 1999 |
| 3 |
PREVAIL: Operation of the electron optics proof-of-concept system Gordon MS, Lieberman JE, Petric PF, Robinson CF, Stickel W Journal of Vacuum Science & Technology B, 17(6), 2851, 1999 |