검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Capacitive discharges driven by combined dc/rf sources Kawamura E, Lieberman MA, Lichtenberg AJ, Hudson EA Journal of Vacuum Science & Technology A, 25(5), 1456, 2007 |
| 2 |
Improved volume-averaged model for steady and pulsed-power electronegative discharges Kim S, Lieberman MA, Lichtenberg AJ, Gudmundsson JT Journal of Vacuum Science & Technology A, 24(6), 2025, 2006 |
| 3 |
Global-Model for High-Pressure Electronegative Radiofrequency Discharges Lee YT, Lieberman MA, Lichtenberg AJ, Bose F, Baltes H, Patrick R Journal of Vacuum Science & Technology A, 15(1), 113, 1997 |
| 4 |
Characterization at Different Aspect Ratios (Radius/Length) of a Radio-Frequency Inductively-Coupled Plasma Source Wainman PN, Lieberman MA, Lichtenberg AJ, Stewart RA, Lee C Journal of Vacuum Science & Technology A, 13(5), 2464, 1995 |