검색결과 : 1건
No. | Article |
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1 |
A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target Suzuki N, Shirai S, Takahashi N, Inaba T, Shiga T Solid State Ionics, 191(1), 49, 2011 |
No. | Article |
---|---|
1 |
A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target Suzuki N, Shirai S, Takahashi N, Inaba T, Shiga T Solid State Ionics, 191(1), 49, 2011 |