검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Contact mechanics and lubrication hydrodynamics of chemical mechanical polishing Tichy J, Levert JA, Shan L, Danyluk S Journal of the Electrochemical Society, 146(4), 1523, 1999 |
| No. | Article |
|---|---|
| 1 |
Contact mechanics and lubrication hydrodynamics of chemical mechanical polishing Tichy J, Levert JA, Shan L, Danyluk S Journal of the Electrochemical Society, 146(4), 1523, 1999 |