검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Feature Scale Simulation Studies of Teos-Sourced Remote Microwave Plasma-Enhanced Chemical-Vapor-Deposition of Silicon Dioxide - Role of Oxygen-Atom Recombination Virmani M, Levedakis DA, Raupp GB, Cale TS Journal of Vacuum Science & Technology A, 14(3), 977, 1996 |
| 2 |
Conformality of SiO2-Films from Tetraethoxysilane-Sourced Remote Microwave Plasma-Enhanced Chemical-Vapor-Deposition Raupp GB, Levedakis DA, Cale TS Journal of Vacuum Science & Technology A, 13(3), 676, 1995 |