검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
3D structuring of multilayer suspended membranes including 2D photonic crystal structures Leclercq JL, Rojo-Romeo P, Seassal C, Mouette J, Letartre X, Viktorovitch P Journal of Vacuum Science & Technology B, 21(6), 2903, 2003 |