검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Morphology and relaxation in InyGa1-yAs/GaAs multi-layer structures Gray AL, Stintz A, Malloy KJ, Newell TC, Lester LF Journal of Crystal Growth, 222(4), 726, 2001 |
| 2 |
Inductively coupled plasma etching of III-V antimonides in BCl3/Ar and Cl-2/Ar Zhang L, Lester LF, Shul RJ, Willison CG, Leavitt RP Journal of Vacuum Science & Technology B, 17(3), 965, 1999 |
| 3 |
Selective inductively coupled plasma etching of group-III nitrides in Cl-2- and BCl3-based plasmas Shul RJ, Willison CG, Bridges MM, Han J, Lee JW, Pearton SJ, Abernathy CR, MacKenzie JD, Donovan SM, Zhang L, Lester LF Journal of Vacuum Science & Technology A, 16(3), 1621, 1998 |