화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering
Lertvanithphol T, Rakreungdet W, Chananonnawathorn C, Eiamchai P, Limwichean S, Nuntawong N, Patthanasettakul V, Klamchuen A, Khemasiri N, Nukeaw J, Seawsakul K, Songsiriritthigul C, Chanlek N, Nakajima H, Songsiriritthigul P, Horprathum M
Applied Surface Science, 492, 99, 2019
2 Oblique angle deposition of nanocolumnar TiZrN films via reactive magnetron co-sputtering technique: The influence of the Zr target powers
Phae-ngam W, Horprathum M, Chananonnawathorn C, Lertvanithphol T, Samransuksamer B, Songsiriritthigul P, Nakajima H, Chaiyakun S
Current Applied Physics, 19(8), 894, 2019