검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Benchmarking stencil reticles for electron projection lithography Wood OR, Trybula WJ, Lercel MJ, Thiel CW, Lawliss MJ, Edinger K, Stanishevsky A, Shimizu S, Kawata S Journal of Vacuum Science & Technology B, 21(6), 3072, 2003 |
| 2 |
Simulating the effects of pattern density gradients on electron-beam projection lithography pattern transfer distortions Reu PL, Engelstad RL, Lovell EG, Magg CK, Lercel MJ, Mackay RS Journal of Vacuum Science & Technology B, 19(6), 2652, 2001 |
| 3 |
Role of gas feed delivery and dilutent on oxide etching in an inductively coupled plasma etch system Lercel MJ, Dang D, Marmillion N, Mlynko W Journal of Vacuum Science & Technology A, 16(3), 1459, 1998 |
| 4 |
Etching processes and characteristics for the fabrication of refractory x-ray masks Lercel MJ, Brooks CJ, Benoit DE, Surendra M Journal of Vacuum Science & Technology B, 16(6), 3577, 1998 |
| 5 |
High-Selectivity Pattern Transfer Processes for Self-Assembled Monolayer Electron-Beam Resists Carr DW, Lercel MJ, Whelan CS, Craighead HG, Seshadri K, Allara DL Journal of Vacuum Science & Technology A, 15(3), 1446, 1997 |
| 6 |
Electron-Beam-Induced Damage in Self-Assembled Monolayers Seshadri K, Froyd K, Parikh AN, Allara DL, Lercel MJ, Craighead HG Journal of Physical Chemistry, 100(39), 15900, 1996 |
| 7 |
Plasma-Etching with Self-Assembled Monolayer Masks for Nanostructure Fabrication Lercel MJ, Craighead HG, Parikh AN, Seshadri K, Allara DL Journal of Vacuum Science & Technology A, 14(3), 1844, 1996 |
| 8 |
High-Resolution Silicon Patterning with Self-Assembled Monolayer Resists Lercel MJ, Whelan CS, Craighead HG, Seshadri K, Allara DL Journal of Vacuum Science & Technology B, 14(6), 4085, 1996 |
| 9 |
Pattern Transfer of Electron-Beam Modified Self-Assembled Monolayers for High-Resolution Lithography Lercel MJ, Rooks M, Tiberio RC, Craighead HG, Sheen CW, Parikh AN, Allara DL Journal of Vacuum Science & Technology B, 13(3), 1139, 1995 |
| 10 |
Electron-Beam Lithography with Monolayers of Alkylthiols and Alkylsiloxanes Lercel MJ, Redinbo GF, Pardo FD, Rooks M, Tiberio RC, Simpson P, Craighead HG, Sheen CW, Parikh AN, Allara DL Journal of Vacuum Science & Technology B, 12(6), 3663, 1994 |