검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Development, installation, and performance of the X-ray stepper JSAL 5C Leonard Q, Malueg D, Wallace J, Taylor JW, Dhuey S, Cerrina F, Boerger B, Selzer R, Yu M, Ma Y, Myers K, Trybendis M, Moon E, Smith HI Journal of Vacuum Science & Technology B, 23(6), 2896, 2005 |
| 2 |
Minimal zone plates for x-ray lithography Amy D, Jiang L, Zheng R, Feldman M, Cerrina F, Dhuey S, Leonard Q, Thielman D Journal of Vacuum Science & Technology B, 22(6), 3570, 2004 |
| 3 |
Modeling, fabrication, and experimental application of clear x-ray phase masks Malueg DH, Taylor JW, Thielman D, Leonard Q, Dhuey S, Cerrina F Journal of Vacuum Science & Technology B, 22(6), 3575, 2004 |
| 4 |
Design and fabrication of Fresnel zone plates with large numbers of zones Chen Z, Vladimirsky Y, Brown M, Leonard Q, Vladimirsky O, Moore F, Cerrina F, Lai B, Yun W, Gluskin E Journal of Vacuum Science & Technology B, 15(6), 2522, 1997 |
| 5 |
Metrology of High-Resolution Resist Structures on Insulating Substrates Difabrizio E, Grella L, Luciani L, Gentili M, Baciocchi M, Figliomeni M, Mastrogiacomo L, Maggiora R, Leonard Q, Cerrina F, Molino M, Powderly D Journal of Vacuum Science & Technology B, 11(6), 2456, 1993 |
| 6 |
Experimental-Study of Aerial Images in X-Ray-Lithography Guo JZ, Leonard Q, Cerrina F, Difabrizio E, Luciani L, Gentili M, Frank J Journal of Vacuum Science & Technology B, 11(6), 2902, 1993 |