화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Observation of deep level centers in 4H and 6H silicon carbide metal oxide semiconductor field effect transistors
Meyer DJ, Dautrich MS, Lenahan PM, Lelis A
Materials Science Forum, 483, 593, 2005
2 Spin dependent recombination at deep-level centers in 6H silicon carbide/silicon metal oxide semiconductor field effect transistors
Meyer DJ, Bohna NA, Lenahan PM, Lelis A
Materials Science Forum, 457-460, 477, 2004
3 E' centers and leakage currents in the gate oxides of metal oxide silicon devices
Lenahan PM, Mele JJ
Journal of Vacuum Science & Technology B, 18(4), 2169, 2000
4 What can electron paramagnetic resonance tell us about the Si/SiO2 system?
Lenahan PM, Conley JF
Journal of Vacuum Science & Technology B, 16(4), 2134, 1998