검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Experimental and modeling study of the sputtered particle transport in an r.f. magnetron discharge Clenet F, Briaud P, Lemperiere G, Turban G Thin Solid Films, 346(1-2), 290, 1999 |
| 2 |
Influence of a DC Substrate Bias on the Resistivity, Composition, Crystallite Size and Microstrain of WTi and WTi-N Films Ramarotafika H, Lemperiere G Thin Solid Films, 266(2), 267, 1995 |
| 3 |
Influence of Low-Energy Ion-Bombardment on the Properties of Tin Films Deposited by RF Magnetron Sputtering Jouan PY, Lemperiere G Thin Solid Films, 237(1-2), 200, 1994 |