검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Special Issue: The route to post-Si CMOS devices: From high mobility channels to graphene-like 2D nanosheets Preface Molle A, Dimoulas A, Le Lay G, Lemme M Applied Surface Science, 291, 1, 2014 |
| 2 |
Electrical characterization of 12 nm EJ-MOSFETs on SOI substrates Henschel W, Wahlbrink T, Georgiev YM, Lemme M, Mollenhauer T, Vratzov B, Fuchs A, Kurz H, Kittler M, Schwierz F Solid-State Electronics, 48(5), 739, 2004 |
| 3 |
Large scale ultraviolet-based nanoimprint lithography Vratzov B, Fuchs A, Lemme M, Henschel W, Kurz H Journal of Vacuum Science & Technology B, 21(6), 2760, 2003 |
| 4 |
Fabrication of 12 nm electrically variable shallow junction metal-oxide-semiconductor field effect transistors on silicon on insulator substrates Henschel W, Wahlbrink T, Geogriev YM, Lemme M, Mollenhauer T, Vratzov B, Fuchs A, Kurz H Journal of Vacuum Science & Technology B, 21(6), 2975, 2003 |