검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of III-V antimonides in BCl3/Ar and Cl-2/Ar Zhang L, Lester LF, Shul RJ, Willison CG, Leavitt RP Journal of Vacuum Science & Technology B, 17(3), 965, 1999 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of III-V antimonides in BCl3/Ar and Cl-2/Ar Zhang L, Lester LF, Shul RJ, Willison CG, Leavitt RP Journal of Vacuum Science & Technology B, 17(3), 965, 1999 |