검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
New line of high voltage high current pulse generators for plasma-based ion implantation Maulat O, Roche M, Le Coeur F, Lesaint O, Arnal Y, Pelletier J Journal of Vacuum Science & Technology B, 17(2), 879, 1999 |
| No. | Article |
|---|---|
| 1 |
New line of high voltage high current pulse generators for plasma-based ion implantation Maulat O, Roche M, Le Coeur F, Lesaint O, Arnal Y, Pelletier J Journal of Vacuum Science & Technology B, 17(2), 879, 1999 |