검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Temperature gradients during absorber etching and their effect on x-ray mask patterning Pendharkar SV, Resnick DJ, Laudon MF, Dauksher WJ, Mangat PJS, Seese PA, Cummings KD Journal of Vacuum Science & Technology B, 16(6), 3500, 1998 |
| 2 |
Pattern placement errors in mask membranes Fisher AH, Laudon MF, Engelstad RL, Lovell EG, Cerrina F Journal of Vacuum Science & Technology B, 15(6), 2249, 1997 |
| 3 |
Optimization of the Refractory X-Ray Mask Fabrication Sequence Cummings KD, Dauksher WJ, Johnson WA, Laudon MF, Engelstad R Journal of Vacuum Science & Technology B, 14(6), 4323, 1996 |
| 4 |
Thermal-Analysis of an X-Ray Mask Membrane in a Plasma Environment Laudon MF, Thole KA, Engelstad RL, Resnick DJ, Cummings KD, Dauksher WJ Journal of Vacuum Science & Technology B, 13(6), 3050, 1995 |
| 5 |
Practical Considerations in X-Ray Mask Mounting Methodology Laird DL, Laudon MF, Engelstad RL Journal of Vacuum Science & Technology B, 11(6), 2953, 1993 |