검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Atomic fluorine beam etching of silicon and related materials Larson PR, Copeland KA, Dharmasena G, Lasell RA, Keil M, Johnson MB Journal of Vacuum Science & Technology B, 18(1), 307, 2000 |
| 2 |
Angular dependence for v',j'-resolved states in F+H-2->HF(v',j')+H reactive scattering using a new atomic fluorine beam source Dharmasena G, Copeland K, Young JH, Lasell RA, Phillips TR, Parker GA, Keil M Journal of Physical Chemistry A, 101(36), 6429, 1997 |