검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films Felmetsger VV, Laptev PN, Tanner SM Journal of Vacuum Science & Technology A, 27(3), 417, 2009 |
| No. | Article |
|---|---|
| 1 |
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films Felmetsger VV, Laptev PN, Tanner SM Journal of Vacuum Science & Technology A, 27(3), 417, 2009 |