검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Interpretation of stress variation in silicon nitride films deposited by electron cyclotron resonance plasma Besland MP, Lapeyrade M, Delmotte F, Hollinger G Journal of Vacuum Science & Technology A, 22(5), 1962, 2004 |
| 2 |
Silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition Lapeyrade M, Besland MP, Meva'a C, Sibai A, Hollinger G Journal of Vacuum Science & Technology A, 17(2), 433, 1999 |