화학공학소재연구정보센터
검색결과 : 18건
No. Article
1 Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3
Cossou B, Jacques S, Couegnat G, King SW, Li L, Lanford WA, Bhattarai G, Paquette M, Chollon G
Thin Solid Films, 681, 47, 2019
2 Role of Hydrogen and Nitrogen on the Surface Chemical Structure of Bioactive Amorphous Silicon Oxynitride Films
Varanasi VG, Ilyas A, Velten MF, Shah A, Lanford WA, Aswath PB
Journal of Physical Chemistry B, 121(38), 8991, 2017
3 Tuning the properties of a complex disordered material: Full factorial investigation of PECVD-grown amorphous hydrogenated boron carbide
Nordell BJ, Keck CL, Nguyen TD, Caruso AN, Purohit SS, Lanford WA, Dutta D, Gidley D, Henry P, King SW, Paquette MM
Materials Chemistry and Physics, 173, 268, 2016
4 Bromine enrichment in the near-surface region of br-doped NaCl single crystals diagnosed by rutherford backscattering spectrometry
Hess M, Krieger UK, Marcolli C, Huthwelker T, Ammann M, Lanford WA, Peter T
Journal of Physical Chemistry A, 111(20), 4312, 2007
5 Inductively coupled hydrogen plasma-assisted Cu ALD on metallic and dielectric surfaces
Jezewski C, Lanford WA, Wiegand CJ, Singh JP, Wang PI, Senkevich JJ, Lu TM
Journal of the Electrochemical Society, 152(2), C60, 2005
6 Molecular caulking - A pore sealing CVD polymer for ultralow k dielectrics
Jezewski C, Wiegand CJ, Ye DX, Mallikarjunan A, Liu DL, Jin CM, Lanford WA, Wang GC, Senkevich JJ, Lu TM
Journal of the Electrochemical Society, 151(7), F157, 2004
7 Phosphorus atomic layers promoting the chemisorption of highly polarizable transition metallorganics
Senkevich JJ, Yang GR, Lu TM, Cale TS, Jezewski C, Lanford WA
Advanced Materials, 14(17), A189, 2002
8 Surface segregation of Al of the bilayers of pure Cu and Cu-Al alloy films
Wang PI, Murarka SP, Kaminski DA, Bedell S, Lanford WA
Journal of the Electrochemical Society, 148(9), G481, 2001
9 Interactions between silica xerogel and tantalum
Rogojevic S, Jain A, Wang F, Gill WN, Wayner PC, Plawsky JL, Lu TM, Yang GR, Lanford WA, Kumar A, Bakhru H, Roy AN
Journal of Vacuum Science & Technology B, 19(2), 354, 2001
10 Surface cleaning of copper by thermal and plasma treatment in reducing and inert ambients
Hymes S, Kumar KS, Murarka SP, Wang W, Lanford WA
Journal of Vacuum Science & Technology B, 16(3), 1107, 1998