검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Deep-sea bonding Lane JM Adhesives Age, 44(10), 27, 2001 |
| 2 |
Feature evolution during plasma etching. II. Polycrystalline silicon etching Lane JM, Klemens FP, Bogart KHA, Malyshev MV, Lee JTC Journal of Vacuum Science & Technology A, 18(1), 188, 2000 |
| 3 |
Mask charging and profile evolution during chlorine plasma etching of silicon Bogart KHA, Klemens FP, Malyshev MV, Colonell JI, Donnelly VM, Lee JTC, Lane JM Journal of Vacuum Science & Technology A, 18(1), 197, 2000 |
| 4 |
The role of feedgas chemistry, mask material, and processing parameters in profile evolution during plasma etching of Si(100) Lane JM, Bogart KHA, Klemens FP, Lee JTC Journal of Vacuum Science & Technology A, 18(5), 2067, 2000 |