화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effects of atomic hydrogen on the selective area growth of Si and Si1-xGex thin films on Si and SiO2 surfaces: Inhibition, nucleation, and growth
Schroeder TW, Lam AM, Ma PF, Engstrom JR
Journal of Vacuum Science & Technology A, 22(3), 578, 2004
2 Supersonic Molecular-Beam Studies of the Dissociative Chemisorption of GeH4 and Ge2H6 on the Ge(100) and Ge(111) Surfaces
Jones ME, Roadman SE, Lam AM, Eres G, Engstrom JR
Journal of Chemical Physics, 105(16), 7140, 1996