검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultrahigh-resolution pattern using electron-beam lithography HF wet etching Tiron R, Mollard L, Louveau O, Lajoinie E Journal of Vacuum Science & Technology B, 25(4), 1147, 2007 |
| 2 |
Efficiency Evaluation of Postetch Metal Stack Anticorrosion Treatments Using Chemical-Analyses by X-Ray Photoelectron-Spectroscopy and Wide Dispersive-X-Ray Fluorescence Czuprynski P, Joubert O, Heitzmann M, Louis D, Vizioz C, Lajoinie E Journal of Vacuum Science & Technology B, 15(4), 1000, 1997 |